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CRITICAL DIMENSION (CD) AFM

The critical dimension atomic force probe is a boot-shaped probe probe used to accurately measure three-dimensional (3D) features. The probe can accurately provide highly linear measurements over a range of line widths, and is not affected by feature type, density or material type. This technology can measure undercut characteristics, and can be calibrated to a traceable standard to ensure measurement accuracy.

  • 3-D Imaging-Round Re-Entrant Tips-W140-L500

    3DIRRT-W140-L500
  • Frequency: Nom: 292
  • Spring Const.: Nom: 35
  • Geometry: Critical Dimension (Overhang)
  • Material: 0.010 - 0.025 Ωcm Silicon
  • Coating: Reflective Aluminum

  • 3-D Imaging-Round Re-Entrant Tips-W32-L220

    3DIRRT-W32-L220
  • Frequency: Nom: 292
  • Spring Const.: Nom: 35
  • Geometry: Critical Dimension (Overhang)
  • Material: 0.010 - 0.025 Ωcm Silicon
  • Coating: Reflective Aluminum

  • 3-D Imaging-Flared Re-Entrant Tips-W100-L300

    3DIFRT-W100-L300
  • Frequency: Nom: 350
  • Spring Const.: Nom: 35
  • Geometry: Critical Dimension (Overhang)
  • Material: 0.01 - 0.02Ωcm Antimony (n) doped Si
  • Coating: Reflective Aluminum

  • 3-D Imaging-Round Re-Entrant Tips-W50-L260

    3DIRRT-W50-L260
  • Frequency: Nom: 292
  • Spring Const.: Nom: 35
  • Geometry: Critical Dimension (Overhang)
  • Material: 0.010 - 0.025 Ωcm Silicon
  • Coating: Reflective Aluminum

  • 3-D Imaging-Round Re-Entrant Tips-W130-L700

    3DIRRT-W130-L700
  • Frequency: Nom: 292
  • Spring Const.: Nom: 35
  • Geometry: Critical Dimension (Overhang)
  • Material: 0.010 - 0.025 Ωcm Silicon
  • Coating: Reflective Aluminum