• Product Force Constant [N/m]

  • Resonant Frequency [kHz]

  • Cantilever

  • Coating

  • Tip


Scanning Capacitance Mode (SCM) is based on the contact mode AFM, using a conductive afm probe to scan semiconductor samples with a DC offset and an AC offset (amplitude DV, ~90 kHz). At the same time that the sample topography image is detected in contact mode, the lateral change of the sample capacitance will generate a capacitance image. The capacitance of the metal oxide semiconductor (MOS) capacitor at the afm tip sample contact is a function of the majority carrier concentration in the sample. SCM uses an ultra-high frequency (1 GHz) detector to measure the capacitance change DC of the AFM tip sample at a bias frequency. The sensor signal is DC/DV. In feedback mode, the output signal is DV, which can be adjusted to maintain the DC/DV set point. SCM provides information about the relative change in the concentration of majority carriers in semiconductors.

  • Platinum-Deposited Cantilevers Probes

  • Frequency: Nom: 70
  • Spring Const.: Nom: 2
  • Geometry: Visible Apex
  • Tip Radius: 15nm
  • Material: 0.01 - 0.02 Ωcm Silicon
  • Coating: Reflective Aluminum
  • AFM Nanoprobes SCM-PtSi Probes

  • Frequency: Nom: 75
  • Spring Const.: Nom: 2.8
  • Geometry: Standard (Steep)
  • Tip Radius: 15nm
  • Material: 0.01 - 0.025 Ocm Antimony (n) doped Si
  • Coating: Reflective Al