• Product Force Constant [N/m]

  • Resonant Frequency [kHz]

  • Cantilever

  • Coating

  • Tip


Scanning Microwave Impedance Microscopy (sMIM) is a sensitive electrical measurement technique that can characterize the dielectric constant, the electrical conductivity of materials and equipment, and local static and time changes in failure analysis. It is used to characterize dielectrics, semiconductors and their doping response, and metals. It can be measured from room temperature to low temperature (where quantum effects become important). Utilizing the near-field electrical interaction between the probe and the sample, sMIM can measure and image nanometer to micrometer electrical properties and operations by incorporating an atomic force microscope. sMIM can produce high-quality images of local electrical characteristics with a resolution better than 50nm. This mode uses the microwave reflection in the nanometer-scale area of the sample directly below the MIM probe. Since the magnitude and phase of these reflections are determined by the local electrical properties, images of changes in dielectric constant and conductivity can be created by detecting reflected microwaves.