• Product Force Constant [N/m]

  • Resonant Frequency [kHz]

  • Cantilever

  • Coating

  • Tip


Deep Trench (DT) mode is an AFM mode specially developed for repeatable measurement of deep semiconductor trench structures <90 nm. This adaptive scanning mode only collects data when certain system state conditions are met, providing online measurement functions for semiconductor manufacturing. Since the DT mode only collects data points when the "good" scan criteria are met, the measurement accuracy is improved.

  • High Density Carbon Spike-40

  • Frequency: Nom: 320
  • Spring Const.: Nom: 42
  • Geometry: High Aspect Ratio
  • Material: 0.01 - 0.025Ωcm Antimony (n) doped Si
  • Coating: Reflective Aluminum